The functional implementation of vacuum valves relies on the precise coupling of the valve body, drive mechanism, sealing pair, and feedback unit. The valve body, as the main pressure bearing structure, is formed by integral forging through five axis linkage processing. The internal flow channel presents a smooth transition shape without stagnation, with a minimum curvature radius of ≥ 3 times the pipe diameter, to avoid molecular adsorption enhancement induced by eddy currents. The sealing pair is the core functional unit of vacuum valves: the metal sealing type is composed of a 316L stainless steel valve plate and a nickel based alloy valve seat to form a line contact seal, with a contact width controlled at 0.08-0.12 mm, and a surface gold-plated (thickness 0.5-1.0 μ m) to enhance atomic level bonding ability; The elastomer seal adopts FFKM molded sealing ring, with a D-shaped or O-shaped cross section and a compression ratio set at 22-28%, ensuring that the interfacial molecular adsorption equilibrium is maintained at 1 × 10 ⁻¹⁰ Pa. In the driving mechanism, the pneumatic actuator adopts a dual piston differential pressure structure to eliminate back pressure interference; Electromagnetic valves rely on the cooperation of permanent magnets and controllable pulse coils to achieve millisecond level response. All moving parts bearings are coated with oil-free solid lubrication, with a stable friction coefficient of 0.08-0.12. The position feedback unit integrates a non-contact Hall sensor with a resolution better than 0.1 °, and the signal output is completely decoupled from mechanical motion. The valve stem penetration adopts a multi-stage labyrinth+graphite packing composite seal, with a static leakage rate of ≤ 5 × 10 ⁻¹ ² Pa · m ³/s. The entire structure must undergo 120 hours of vacuum high-temperature degassing treatment after assembly, with a surface gas release rate of ≤ 1 × 10 ⁻¹² Pa · m ³/(cm ² · s).